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Deposition of MnO anode And MnO2 cathode thin films by plasma enhanced atomic layer deposition using the Mn(thd)3 precursor
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Authors
Mattelaer, Felix
;
Vereecken, Philippe
;
Dendooven, Jolien
;
Detavernier, Christophe
ISSN
0897-4756
Issue
10
Journal
Chemistry of Materials
Volume
27
Title
Deposition of MnO anode And MnO2 cathode thin films by plasma enhanced atomic layer deposition using the Mn(thd)3 precursor
Publication type
Journal article
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