Publication:

Lithographic performance of 193 nm single and bi-layer materials

Date

1998
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

2578.pdf 1.5 MB

Author(s)

Goethals, Mieke
;
Pollers, Ingrid
;
Van Roey, Frieda  
;
Sugihara, Takashi
;
Ronse, Kurt  
;
Van Driessche, Veerle  
;
Tzviatkov, Plamen
;
Medina, A.
;
Gabor, A.
;
Blakeney, A.
;
Steinhausler, T.
;
Biafore, J.
;
Slater, S.
;
Nalamasu, O.
;
Houlihan, F.
;
Kometani, J.
;
Timko, A.
;
Cirelli, R.

Journal

Journal of Photopolymer Science and Technology

Abstract

Description

Statistics

Views

1995 since deposited on 2021-09-30
3last month
1last week
Acq. date: 2026-08-30

Citations

Statistics

Views

1995 since deposited on 2021-09-30
3last month
1last week
Acq. date: 2026-08-30

Citations