Enhancement of active phosphorus concentration in Ge CVD layers in view of group-IV optical interconnections using low temperature in-situ doping and high order Ge precursors

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Authors
Shimura, Yosuke; Srinivasan, Ashwyn; Van Thourhout, Dries; Van Deun, R.; Pantouvaki, Marianna; Van Campenhout, Joris; Loo, Roger
Conference
International Symposium on EcoTopia Science - ISETS
Title
Enhancement of active phosphorus concentration in Ge CVD layers in view of group-IV optical interconnections using low temperature in-situ doping and high order Ge precursors
Publication type
Proceedings paper
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