Line profile measurement of advanced-FinFET features by reference metrology

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Authors
Takamasu, Kiyoshi; Iwaki, Y.; Takahashi, S.; Kawada, H.; Ikota, M.; Yamaguchu, A.; Lorusso, Gian; Horiguchi, Naoto
Conference
Metrology, Inspection, and Process Control for Microlithography XXIX
Title
Line profile measurement of advanced-FinFET features by reference metrology
Publication type
Proceedings paper
Embargo date
9999-12-31
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