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In-depth low frequency noise evaluation of substrate rotation and strain engineering in n-type triple gate SOI FinFETs
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Authors
Trevisoli, R.
;
de Souza, M.
;
Martino, J.A.
;
Simoen, Eddy
;
Claeys, Cor
;
Pavanello, M.A.
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
147
Title
In-depth low frequency noise evaluation of substrate rotation and strain engineering in n-type triple gate SOI FinFETs
Publication type
Journal article
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