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Thickness dependence and annealing behavior of Pt-group metal thin films as alternative metals for advanced interconnects
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1836 since deposited on 2021-10-23
2last month
Acq. date: 2026-08-09
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Statistics
Views
1836 since deposited on 2021-10-23
2last month
Acq. date: 2026-08-09
Citations