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Thickness dependence and annealing behavior of Pt-group metal thin films as alternative metals for advanced interconnects
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1839 since deposited on 2021-10-23
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Acq. date: 2026-10-11
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Statistics
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1839 since deposited on 2021-10-23
1last month
1last week
Acq. date: 2026-10-11
Citations