Authors

Eyben, Pierre; Matagne, Philippe; Chiarella, Thomas; De Keersgieter, An; Kubicek, Stefan; Mitard, Jerome; Mocuta, Anda; Horiguchi, Naoto; Thean, Aaron; Mocuta, Dan

Conference

International Conference on Simulation of Semiconductor Processes and Devices - SISPAD

Title

Accurate prediction of device performance in sub-10nm WFIN FinFETs using scalpel SSRM-based calibration of process simulations

Publication type

Proceedings paper

Embargo date

9999-12-31