SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

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Authors

Gorissen, Benjamin; Van Hoof, Chris; Reynaerts, Dominiek; De Volder, Michael

ISSN

2055-7434

Journal

Microsystems & Nanoengineering

Volume

2

Title

SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

Publication type

Journal article

Embargo date

9999-12-31

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