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Characterisation of HF-last cleaning of ion-implanted Si surfaces
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Authors
Kondoh, Eiichi
;
Baklanov, Mikhaïl
;
Jonckx, Franky
;
Maex, Karen
Issue
2
Journal
Materials Science in Semiconductor Processing
Volume
1
Title
Characterisation of HF-last cleaning of ion-implanted Si surfaces
Publication type
Journal article
Embargo date
9999-12-31
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