Publication:

Edge trimming for wafer-to-wafer 3D integration

Date

2016
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

33017.pdf 784.73 KB

Author(s)

Inoue, Fumihiro  
;
Visker, Jakob  
;
Jourdain, Anne  
;
Moeller, Berthold
;
Yokoyama, Kaori
;
Peng, Lan  
;
Kosemura, Daisuke
;
De Wolf, Ingrid  
;
Rebibis, Kenneth June  
;
Miller, Andy  
;
Beyne, Eric  
;
Sleeckx, Erik  

Journal

Abstract

Description

Statistics

Views

2054 since deposited on 2021-10-23
3last month
2last week
Acq. date: 2026-04-06

Citations

Statistics

Views

2054 since deposited on 2021-10-23
3last month
2last week
Acq. date: 2026-04-06

Citations