Authors

Jayachandran, Suseendran; Billen, Arne; Douhard, Bastien; Conard, Thierry; Meersschaut, Johan; Moussa, Alain; Caymax, Matty; Bender, Hugo; Vandervorst, Wilfried; Heyns, Marc; Delabie, Annelies

ISSN

0169-4332

Journal

Applied Surface Science

Volume

384

Title

Growth mechanisms for Si epitaxy on O atomic layers: impact of O-content and surface structure

Publication type

Journal article