Publication:

Electrical characteristics of P-type bulk Si fin field-effect transistor using solid-source doping with 1-nm phosphosilicate glass

Date

2016

Journal article

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Author(s)

Kikuchi, Yoshiaki

;

Chiarella, Thomas

;

De Roest, David

;

Blanquart, Timothee

;

De Keersgieter, An

;

;

;

;

Van Besien, Els

;

;

;

Kubicek, Stefan

;

;

;

Demuynck, Steven

;

;

;

Horiguchi, Naoto

Journal

IEEE Electron Device Letters

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Acq. date: 2026-05-19