Authors

Kikuchi, Yoshiaki; Hopf, Toby; Mannaert, Geert; Tao, Zheng; Waite, A.; Cournoyer, J.; Borniquel, J.; Schreutelkamp, Rob; Ritzenthaler, Romain; Kim, Min-Soo; Kubicek, Stefan; Chew, Soon Aik; Devriendt, Katia; Schram, Tom; Demuynck, Steven; Variam, N.; Horiguchi, Naoto; Mocuta, Dan

Conference

IEEE International Electron Devices Meeting - IEDM

Title

Improvement of the CMOS characteristics of bulk Si FinFETs by high temperature ion implantation

Publication type

Meeting abstract

Embargo date

9999-12-31