Publication:

Improvement of the CMOS characteristics of bulk Si FinFETs by high temperature ion implantation

Date

2016

Meeting abstract

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Files

34413.pdf 649.81 KB

Author(s)

Kikuchi, Yoshiaki

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Mannaert, Geert

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Schreutelkamp, Rob

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Ritzenthaler, Romain

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;

Kubicek, Stefan

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Devriendt, Katia

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Demuynck, Steven

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;

Horiguchi, Naoto

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Statistics

1911 since deposited on 2021-10-23

Acq. date: 2026-02-24