Publication:

Dielectric liner reliability in via-middle through silicon vias with 3 micron diameter

Date

2016

Journal article

Simple item page Full metadata Statistics

Author(s)

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Van Huylenbroeck, Stefaan

;

Roussel, Philippe

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;

Gopinath, Sanjaj

;

M. Anjos, Daniela

;

Thorum, Matthew

;

;

;

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Journal

Microelectronic Engineering

Statistics

1978 since deposited on 2021-10-23

Acq. date: 2026-02-25