Authors

Nuytten, Thomas; Kosemura, Daisuke; Bogdanowicz, Janusz; Witters, Liesbeth; Eneman, Geert; Hantschel, Thomas; Schulze, Andreas; Favia, Paola; Bender, Hugo; De Wolf, Ingrid; Vandervorst, Wilfried

Conference

14th International Conference on Reliability and Stress-Related Phenomena in Nanoelectronics - Experiment and Simulation - IRSP

Title

Stress measurements in semiconductor devices using nano-focused Raman spectroscopy

Publication type

Proceedings paper