Authors

Oliveira, Alberto V.; Simoen, Eddy; Agopian, Paula G.D.; Martino, Joao A; Mitard, Jerome; Witters, Liesbeth; Langer, Robert; Collaert, Nadine; Thean, Aaron; Claeys, Cor

ISSN

0268-1242

Issue

11

Journal

Semiconductor Science and Technology

Volume

31

Title

Split-CV mobility at low temperature operation of Ge pFinFETs fabricated with STI first and last process

Publication type

Journal article

Embargo date

9999-12-31