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The etching behavior of tungsten (W) with respect to the orientation of the grain boundary and masking layers
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Authors
Lee, Hean-Cheal
;
Vanhaelemeersch, Serge
Issue
1
Journal
Thin Solid Films
Volume
320
Title
The etching behavior of tungsten (W) with respect to the orientation of the grain boundary and masking layers
Publication type
Journal article
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