Publication:
Diffusion and gate replacement: a new gate-first high-k/metal gate CMOS integration scheme suppressing gate height symmetry
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1969 since deposited on 2021-10-23
1last month
Acq. date: 2026-01-07
Citations
Metrics
Views
1969 since deposited on 2021-10-23
1last month
Acq. date: 2026-01-07
Citations