High-density and low-leakage novel embedded 3D MIM capacitor on Si interposer

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Authors
Roda Neve, Cesar; Detalle, Mikael; Nolmans, Philip; Li, Yunlong; De Vos, Joeri; Van der Plas, Geert; Beyer, Gerald; Beyne, Eric
Conference
IEEE International Conference on 3D System Integration - 3DIC
Title
High-density and low-leakage novel embedded 3D MIM capacitor on Si interposer
Publication type
Proceedings paper
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