Publication:
Selective epitaxial growth of high-P Si:P for dource/drain formation in advanced Si nFETs
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1905 since deposited on 2021-10-23
6last month
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Acq. date: 2026-01-07
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Metrics
Views
1905 since deposited on 2021-10-23
6last month
2last week
Acq. date: 2026-01-07
Citations