Authors

Subirats, Alexandre; Capogreco, Elena; Degraeve, Robin; Arreghini, Antonio; Van den Bosch, Geert; Linten, Dimitri; Van Houdt, Jan; Furnemont, Arnaud

Conference

IEEE Reliability Physics Symposium - IRPS

Title

Channel and near channel defects characterization in vertical InxGa1-xAs high mobility channels for future 3D NAND memory

Publication type

Proceedings paper

Embargo date

9999-12-31