Authors

Veloso, Anabela; Cho, Moon Ju; Simoen, Eddy; Hellings, Geert; Matagne, Philippe; Collaert, Nadine; Thean, Aaron

Conference

Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufacturing

Title

Gate-all-around nanowire FETs vs. triple-gate FinFETs: on gate integrity and device characteristics

Publication type

Proceedings paper

Embargo date

9999-12-31