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Impact of the low temperature operation on long channel strained Ge pFinFETs fabricated with STI first and last processes
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Authors
Vinicius de Oliveira, Alberto
;
Simoen, Eddy
;
Ghedini der Agopian, Paula
;
Martino, Joao Antonio
;
Witters, Liesbeth
;
Collaert, Nadine
;
Thean, Aaron
;
Claeys, Cor
Conference
2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)
Title
Impact of the low temperature operation on long channel strained Ge pFinFETs fabricated with STI first and last processes
Publication type
Proceedings paper
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