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Benchmarking Ge1-xSnx CVD Epitaxy using GeH4 and Ge2H6
Publication:
Benchmarking Ge1-xSnx CVD Epitaxy using GeH4 and Ge2H6
Date
2016-11
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vohra, Anurag
;
Loo, Roger
;
Kohen, David
;
Margetis, Joe
;
Tolle, John
;
Stange, Daniela
;
Buca, Dan
;
Vandervorst, Wilfried
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1969
since deposited on 2021-10-23
1
last week
Acq. date: 2025-10-29
Citations
Metrics
Views
1969
since deposited on 2021-10-23
1
last week
Acq. date: 2025-10-29
Citations