Publication:

Benchmarking Ge1-xSnx CVD Epitaxy using GeH4 and Ge2H6

Date

2016
Meeting abstract
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Author(s)

Vohra, Anurag  
;
Loo, Roger  
;
Kohen, David
;
Margetis, Joe
;
Tolle, John
;
Stange, Daniela
;
Buca, Dan
;
Vandervorst, Wilfried  

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Abstract

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1976 since deposited on 2021-10-23
Acq. date: 2026-07-16

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1976 since deposited on 2021-10-23
Acq. date: 2026-07-16

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