Authors

Vohra, Anurag; Loo, Roger; Kohen, David; Margetis, Joe; Tolle, John; Stange, Daniela; Buca, Dan; Vandervorst, Wilfried

Conference

JSPS - FZ-Jülich Workshop on "Atomically Controlled Processing for Ultra-large Scale Integration"

Title

Benchmarking Ge1-xSnx CVD Epitaxy using GeH4 and Ge2H6

Publication type

Meeting abstract