Publication:
Improved Ru/Si multilayer reflective coatings for advanced extreme-ultraviolet lithography photomasks
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1937 since deposited on 2021-10-23
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Acq. date: 2026-10-12
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1937 since deposited on 2021-10-23
6last month
4last week
Acq. date: 2026-10-12
Citations