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Titanium silicide on Si:P with precontact amorphization implantation treatment: contact resistivity approaching 1×10-9 Ohm-cm²
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Acq. date: 2026-03-17
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1 since deposited on 2021-10-23
Acq. date: 2026-03-17
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2003 since deposited on 2021-10-23
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Acq. date: 2026-03-17
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