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The effect of patterning options on embedded memory cells in logic technologies at iN10 and iN7
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Authors
Appeltans, Raf
;
Weckx, Pieter
;
Raghavan, Praveen
;
Kim, Ryan Ryoung han
;
Kar, Gouri Sankar
;
Furnemont, Arnaud
;
Van der Perre, Liesbet
;
Dehaene, Wim
Conference
Design-Process-Technology Co-optimization for Manufacturability XI
Title
The effect of patterning options on embedded memory cells in logic technologies at iN10 and iN7
Publication type
Proceedings paper
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