Authors

Beyne, Sofie; Croes, Kristof; van der Veen, Marleen; Varela Pedreira, Olalla; Qi, Q.; De Wolf, Ingrid; Tokei, Zsolt

Conference

IEEE International Interconnect Technology Conference - IITC

Title

Study of electromigration mechanisms in 22nm half-pitch Cu interconnects by 1/f noise measurements

Publication type

Proceedings paper

Embargo date

9999-12-31