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Statistical distribution of through-silicon via Cu pumping
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Authors
De Messemaeker, Joke
;
Roussel, Philippe
;
Varela Pedreira, Olalla
;
Van der Donck, Tom
;
Van Huylenbroeck, Stefaan
;
Beyne, Eric
;
De Wolf, Ingrid
;
Stucchi, Michele
;
Croes, Kristof
ISSN
1530-4388
Issue
3
Journal
IEEE Transactions on Device and Materials Reliability
Volume
17
Title
Statistical distribution of through-silicon via Cu pumping
Publication type
Journal article
Embargo date
9999-12-31
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