Authors

Florent, Karine; Lavizzari, Simone; Di Piazza, Luca; Popovici, Mihaela Ioana; Vecchio, Emma; Potoms, Goedele; Groeseneken, Guido; Van Houdt, Jan

Conference

Symposium on VLSI Technology

Title

First demonstration of vertically stacked ferroelectric Al doped HfO2 devices for NAND applications

Publication type

Proceedings paper

Embargo date

9999-12-31