Publication:

Study of copper surface preparation by sequential atomic layer wet etching and laser annealing treatments

Date

2017

Meeting abstract

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Author(s)

Iwasaki, Akihisa

;

;

Matsumoto, Fulvio

;

;

;

Holsteyns, Frank

Statistics

1949 since deposited on 2021-10-24

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Acq. date: 2026-08-07