Authors

Iwasaki, Akihisa; Akanishi, Yuya; Mazzamuto, Fulvio; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank

Conference

232nd ECS Fall Meeting - 15th International Symposium on Semiconductor Cleaning Science and Technology - SCST15

Title

Study of copper surface preparation by sequential atomic layer wet etching and laser annealing treatments

Publication type

Proceedings paper

Embargo date

9999-12-31