Publication:

Exploration of a low-temperature PEALD technology to trim and smooth 193i photoresist

Date

2017

Proceedings Paper

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Files

37299.pdf 1.88 MB

Author(s)

Lazzarino, Frederic

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De Roest, David

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;

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Decoster, Stefan

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Rutigliani, Vito

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Constantoudis, Vassilios

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Van Elshocht, Sven

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;

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Acq. date: 2026-08-07