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Electromigration behaviour of 0.3 μm damascene vs. plasma-etched interconnects: a lifetime and drift analysis
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Acq. date: 2026-04-27
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9 since deposited on 2021-10-01
Acq. date: 2026-04-27
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1991 since deposited on 2021-10-01
1last month
1last week
Acq. date: 2026-04-27
Citations