Epitaxial CVD growth of ultra-thin Si passivation layers on strained Ge Fin structures

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Authors
Loo, Roger; Arimura, Hiroaki; Cott, Daire; Witters, Liesbeth; Pourtois, Geoffrey; Schulze, Andreas; Douhard, Bastien; Vanherle, Wendy; Eneman, Geert; Richard, Olivier; Favia, Paola; Mitard, Jerome; Mocuta, Dan; Langer, Robert; Collaert, Nadine
Conference
232nd ECS Fall Meeting: Semiconductor Process Integration 10
Title
Epitaxial CVD growth of ultra-thin Si passivation layers on strained Ge Fin structures
Publication type
Proceedings paper
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