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Epitaxial CVD growth of ultra-thin Si passivation layers on strained Ge Fin structures
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Epitaxial CVD growth of ultra-thin Si passivation layers on strained Ge Fin structures
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Date
2017-09
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loo, Roger
;
Arimura, Hiroaki
;
Cott, Daire
;
Witters, Liesbeth
;
Pourtois, Geoffrey
;
Schulze, Andreas
;
Douhard, Bastien
;
Vanherle, Wendy
;
Eneman, Geert
;
Richard, Olivier
;
Favia, Paola
;
Mitard, Jerome
;
Mocuta, Dan
;
Langer, Robert
;
Collaert, Nadine
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1894
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Acq. date: 2026-01-07
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Views
1894
since deposited on 2021-10-24
3
last month
3
last week
Acq. date: 2026-01-07
Citations