Publication:
Sub-resolution feature OPC as an enabler for manufacturing at 0.2 μm and below
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1 since deposited on 2021-10-01
Acq. date: 2026-06-01
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1934 since deposited on 2021-10-01
Acq. date: 2026-06-01
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1 since deposited on 2021-10-01
Acq. date: 2026-06-01
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1934 since deposited on 2021-10-01
Acq. date: 2026-06-01
Citations