Publication:

RIE dynamics for extreme wafer thinning applications

Date

2017

Meeting abstract

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Author(s)

Rassoul, Nouredine

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Tutunjyan, Nina

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Inoue, Fumihiro

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Jash Patel, Patel

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Metrics

2075 since deposited on 2021-10-24

Acq. date: 2025-12-15