Highly doped low-temperature Si:P growth for source/drain formation in advanced Si nFETs

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Authors
Rosseel, Erik; Kohen, David; Hikavyy, Andriy; Porret, Clément; Loo, Roger; Tolle, John; Vandooren, Anne; Veloso, Anabela; Collaert, Nadine; Mocuta, Dan; Langer, Robert
Conference
e-MRS Fall Meeting
Title
Highly doped low-temperature Si:P growth for source/drain formation in advanced Si nFETs
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Meeting abstract
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