Strain and composition monitoring in various (Si)Ge fin structures using in-line HRXRD

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Authors
Schulze, Andreas; Loo, Roger; Witters, Liesbeth; Mertens, Hans; Collaert, Nadine; Horiguchi, Naoto; Wormington, Matthew; Ryan, Paul; Vandervorst, Wilfried; Caymax, Matty
Conference
Frontiers of Characterization and Metrology for Nanoelectronics - FCMN
Title
Strain and composition monitoring in various (Si)Ge fin structures using in-line HRXRD
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Meeting abstract
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