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Growth inhibition of metal oxide ALD on advanced patterning film (APF) for tone reversal of HfO2 and TiO2 patterned structures
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Authors
Stevens, Eric
;
Tomczak, Yoann
;
Chan, BT
;
Altamirano Sanchez, Efrain
;
Delabie, Annelies
;
Parsons, Gregory
Conference
17th International Conference on Atomic Layer Deposition - ALD
Title
Growth inhibition of metal oxide ALD on advanced patterning film (APF) for tone reversal of HfO2 and TiO2 patterned structures
Publication type
Proceedings paper
Embargo date
9999-12-31
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