A simple and efficient RF technique for the TSV characterization

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Authors
Sun, Xiao; Roda Neve, Cesar; Van Huylenbroeck, Stefaan; Van der Plas, Geert; Beyne, Eric
Conference
37th Electronic Components and Technology Conference - ECTC
Title
A simple and efficient RF technique for the TSV characterization
Publication type
Proceedings paper
Embargo date
9999-12-31
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