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Local mechanical stress induced during Ti- and Co/Ti silicidation reaction in sub-0.25 µm MOS technologies
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1974 since deposited on 2021-10-01
1last month
Acq. date: 2025-12-18
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Metrics
Views
1974 since deposited on 2021-10-01
1last month
Acq. date: 2025-12-18
Citations