Publication:
Challenges on surface conditioning in 3D device architectures: triple-gate finFETs, gate-all-around lateral and vertical nanowireFETs
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1985 since deposited on 2021-10-24
Acq. date: 2026-05-30
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Statistics
Views
1985 since deposited on 2021-10-24
Acq. date: 2026-05-30
Citations