Publication:
Challenges on surface conditioning in 3D device architectures: triple-gate finFETs, gate-all-around lateral and vertical nanowireFETs
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1982 since deposited on 2021-10-24
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Acq. date: 2026-03-17
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1982 since deposited on 2021-10-24
2last month
2last week
Acq. date: 2026-03-17
Citations