CMOS area scaling and the need for high aspect ratio vias

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Authors
Briggs, Basoene; Guissi, Sofiane; Wilson, Chris; Ryckaert, Julien; Paolillo, Sara; Vandersmissen, Kevin; Versluijs, Janko; Lorant, Christophe; Heylen, Nancy; Boemmels, Juergen; Tokei, Zsolt; Sherazi, Yasser; Weckx, Pieter; Kljucar, Luka; van der Veen, Marleen; Boccardi, Guillaume; De Heyn, Vincent; Gupta, Anshul; Ervin, Joseph; Kamon, Matt
Conference
50th International Conference on Solid State Devices and Materials - SSDM
Title
CMOS area scaling and the need for high aspect ratio vias
Publication type
Proceedings paper
Embargo date
9999-12-31
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