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Layer-controlled epitaxy of 2D semiconductors: bridging nanoscale phenomena to wafer-scale uniformity
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Authors
Chiappe, Daniele
;
Ludwig, Jonathan
;
Leonhardt, Alessandra
;
El Kazzi, Salim
;
Nalin Mehta, Ankit
;
Nuytten, Thomas
;
Celano, Umberto
;
Sutar, Surajit
;
Pourtois, Geoffrey
;
Caymax, Matty
;
Paredis, Kristof
;
Vandervorst, Wilfried
;
Lin, Dennis
;
De Gendt, Stefan
;
Barla, Kathy
;
Huyghebaert, Cedric
;
Asselberghs, Inge
;
Radu, Iuliana
ISSN
0957-4484
Issue
42
Journal
Nanotechnology
Volume
29
Title
Layer-controlled epitaxy of 2D semiconductors: bridging nanoscale phenomena to wafer-scale uniformity
Publication type
Journal article
Embargo date
9999-12-31
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