The path to better understanding stochastics in EUV photoresist

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Authors

De Simone, Danilo; Vesters, Yannick; Vandenberghe, Geert

ISSN

0914-9244

Issue

5

Journal

Journal of Photopolymer Science and Technology

Volume

31

Title

The path to better understanding stochastics in EUV photoresist

Publication type

Journal article

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