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Vertical ferroelectric HfO2 FET based on 3-D NAND architecture: towards dense low-power memory
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Authors
Florent, Karine
;
Pesic, Milan
;
Subirats, Alexandre
;
Banerjee, Kaustuv
;
Lavizzari, Simone
;
Arreghini, Antonio
;
Di Piazza, Luca
;
Potoms, Goedele
;
Sebaai, Farid
;
McMitchell, Sean
;
Popovici, Mihaela Ioana
;
Groeseneken, Guido
;
Van Houdt, Jan
Conference
IEEE International Electron Devices Meeting - IEDM
Title
Vertical ferroelectric HfO2 FET based on 3-D NAND architecture: towards dense low-power memory
Publication type
Proceedings paper
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