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An in-situ resistance measurement to extract IMC resistivity and kinetic parameter of alternative metallurgies for 3D stacking
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Authors
Hou, Lin
;
Derakhshandeh, Jaber
;
Radisic, Alex
;
Honore, Mia
;
De Coster, Jeroen
;
Cherman, Vladimir
;
Bex, Pieter
;
Beyer, Gerald
;
Beyne, Eric
;
De Wolf, Ingrid
;
Rebibis, Kenneth June
Conference
7th Electronic System-Integration Technology Conference - ESTC
Title
An in-situ resistance measurement to extract IMC resistivity and kinetic parameter of alternative metallurgies for 3D stacking
Publication type
Proceedings paper
Embargo date
9999-12-31
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