Publication:

Edge trimming induced defects on direct bonded wafers

Date

2018

Journal article

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Author(s)

Inoue, Fumihiro

;

;

;

Phommahaxay, Alain

;

Kosemura, Daisuke

;

De Wolf, Ingrid

;

Rebibis, Kenneth June

;

;

;

Journal

Journal of Electronic Packaging

Metrics

2016 since deposited on 2021-10-25

Acq. date: 2026-01-08