Publication:

Edge trimming induced defects on direct bonded wafers

Date

2018
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Inoue, Fumihiro  
;
Jourdain, Anne  
;
Peng, Lan  
;
Phommahaxay, Alain  
;
Kosemura, Daisuke
;
De Wolf, Ingrid  
;
Rebibis, Kenneth June  
;
Miller, Andy  
;
Sleeckx, Erik  
;
Beyne, Eric  

Journal

Journal of Electronic Packaging

Abstract

Description

Statistics

Views

2024 since deposited on 2021-10-25
7last month
2last week
Acq. date: 2026-02-25

Citations

Statistics

Views

2024 since deposited on 2021-10-25
7last month
2last week
Acq. date: 2026-02-25

Citations