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Cu resistivity and intrinsic EM-reliability study in Ta/Cu, Co/Cu and Ru/Cu systems for advanced BEOL Cu interconnections
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Authors
Jourdan, Nicolas
;
Varela Pedreira, Olalla
;
van der Veen, Marleen
;
Adelmann, Christoph
;
Van Elshocht, Sven
;
Tokei, Zsolt
Conference
50th International Conference on Solid State Devices and Materials - SSDM
Title
Cu resistivity and intrinsic EM-reliability study in Ta/Cu, Co/Cu and Ru/Cu systems for advanced BEOL Cu interconnections
Publication type
Proceedings paper
Embargo date
9999-12-31
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